I am a little bit curious...if ASML makes the machines, why is TSMC taking credit for 3nm development? Or are the machines not fully developed out of the box and need more work to achieve different nodes?
My guess is the following: ASML produces the lithography machines, and TSMC/Samsung/<chipmaker> uses them in mass production. What I hear from the Dutch news is that the development process is very much a cooperation between different companies. What works in ASMLs lab will likely need a lot of tweaking before it can be used in mass production.
